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Maybe it helps. Had the same problem. Drove me crazy. After trying a lot of things, I finally figured out that it was a broken USB cable to my Eizo monitor hub that was causing the problem (like someone reported before in the forum). Changed the cable and everything is working perfectly again and the Mac Studio sleeps without waking up by itself as long as I want :).
 
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But as I've stated, it's not a problem staying asleep. If it goes to sleep using sleep under the Apple menu, it never wakes up until I touch my keyboard. The problem is how many times I have to use sleep under the Apple menu until it does go to sleep. I've gone as high as 8 times in a row, hitting sleep, my Display going right back to the sign in screen, signing in, trying sleep again and having this happen over and over until it does stay asleep. Been trying everything people have suggested and nothing seems to work. Oh well.
 
I used hot corners to put my studio to sleep -- using an apple wireless mouse did not work this way, but plugging an old USB cabled apple mouse I had lying around in and using that to activate the hot corner seemed to do the trick. Doesn't work flawlessly, but does work reliably.
 
I had the same issue. I discovered that the Logitech app was causing it (I’m using Logitech mouse and keyboard). I installed the new version Logi option + which solved the issue.
 
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